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dc.contributor.authorSinger, Jonathan P.
Lee, Jae-Hwang
Kooi, Steven E.
Thomas, Edwin L.
dc.date.accessioned 2013-04-17T16:21:43Z
dc.date.available 2013-04-17T16:21:43Z
dc.date.issued 2012
dc.identifier.citation Singer, Jonathan P., Lee, Jae-Hwang, Kooi, Steven E., et al.. "Rapid fabrication of 3D terahertz split ring resonator arrays by novel single-shot direct write focused proximity field nanopatterning." Optics Express, 20, no. 10 (2012) Optical Society of America: http://dx.doi.org/10.1364/OE.20.011097.
dc.identifier.urihttps://hdl.handle.net/1911/70945
dc.description.abstract For the next generation of phoXonic, plasmonic, optomechanical and microfluidic devices, the capability to create 3D microstructures is highly desirable. Fabrication of such structures by conventional top-down techniques generally requires multiple timeconsuming steps and is limited in the ability to define features spanning multiple layers at prescribed angles. 3D direct write lithography (3DDW) has the capability to draw nearly arbitrary structures, but is an inherently slow serial writing process. Here we present a method, denoted focused proximity field nanopatterning (FPnP), that combines 3DDW with single or multiphoton interference lithography (IL). By exposing a thick photoresist layer having a phase mask pattern imprinted on its surface with a tightly focused laser beam, we produce locally unique complex structures. The morphology can be varied based on beam and mask parameters. Patterns may be written rapidly in a single shot mode with arbitrary positions defined by the direct write, thus exploiting the control of 3DDW with the enhanced speed of phase mask IL. Here we show the ability for this technique to rapidly produce arrays of “stand-up” far IR resonators.
dc.language.iso eng
dc.publisher Optical Society of America
dc.rights Article is made available in accordance with the publisher's policy and may be subject to US copyright law. Please refer to the publisher's site for terms of use.
dc.title Rapid fabrication of 3D terahertz split ring resonator arrays by novel single-shot direct write focused proximity field nanopatterning
dc.type Journal article
dc.citation.journalTitle Optics Express
dc.subject.keywordlaser materials processing
microstructure fabrication
metamaterials
dc.citation.volumeNumber 20
dc.citation.issueNumber 10
dc.embargo.terms none
dc.type.dcmi Text
dc.identifier.doihttp://dx.doi.org/10.1364/OE.20.011097
dc.identifier.pmid 22565733
dc.type.publication publisher version


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