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    Rapid fabrication of 3D terahertz split ring resonator arrays by novel single-shot direct write focused proximity field nanopatterning

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    Author
    Singer, Jonathan P.
    Lee, Jae-Hwang
    Kooi, Steven E.
    Thomas, Edwin L.
    Date
    2012
    Citation
    Singer, Jonathan P., Lee, Jae-Hwang, Kooi, Steven E., et al.. "Rapid fabrication of 3D terahertz split ring resonator arrays by novel single-shot direct write focused proximity field nanopatterning." Optics Express, 20, no. 10 (2012) http://dx.doi.org/10.1364/OE.20.011097.
    Published Version
    http://dx.doi.org/10.1364/OE.20.011097
    Abstract
    For the next generation of phoXonic, plasmonic, optomechanical and microfluidic devices, the capability to create 3D microstructures is highly desirable. Fabrication of such structures by conventional top-down techniques generally requires multiple timeconsuming steps and is limited in the ability to define features spanning multiple layers at prescribed angles. 3D direct write lithography (3DDW) has the capability to draw nearly arbitrary structures, but is an inherently slow serial writing process. Here we present a method, denoted focused proximity field nanopatterning (FPnP), that combines 3DDW with single or multiphoton interference lithography (IL). By exposing a thick photoresist layer having a phase mask pattern imprinted on its surface with a tightly focused laser beam, we produce locally unique complex structures. The morphology can be varied based on beam and mask parameters. Patterns may be written rapidly in a single shot mode with arbitrary positions defined by the direct write, thus exploiting the control of 3DDW with the enhanced speed of phase mask IL. Here we show the ability for this technique to rapidly produce arrays of “stand-up” far IR resonators.
    Keyword
    laser materials processing; microstructure fabrication; metamaterials
    Type
    Journal article
    Citable link to this page
    http://hdl.handle.net/1911/70945
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    • Faculty Publications [2827]
    • Mechanical Engineering Publications [68]

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    Managed by the Digital Scholarship Services at Fondren Library, Rice University
    Physical Address: 6100 Main Street, Houston, Texas 77005
    Mailing Address: MS-44, P.O.BOX 1892, Houston, Texas 77251-1892