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dc.contributor.authorErdelyi, Miklos
Sengupta, Chaitali
Bor, Zsolt
Cavallaro, Joseph R.
Kido, Motoi
Smayling, Michael C.
Tittel, Frank K.
Wilson, William L.
Szabo, Gabor 2012-06-21T22:05:35Z 2012-06-21T22:05:35Z 1995-02-01
dc.identifier.citation M. Erdelyi, C. Sengupta, Z. Bor, J. R. Cavallaro, M. Kido, M. C. Smayling, F. K. Tittel, W. L. Wilson and G. Szabo, "A New Interferometric Phase-Shifting Technique for Sub-half-micron Laser Microlithography," 1995.
dc.description.abstract This paper reports recent progress in achieving sub-half-micron feature sizes with UV laser illumination based on a novel interferometric phase shifting (IPS) technique. In the IPS arrangement, the intensity and amount of phase shift of the shifted beam can be controlled continuously and independently using the same mask. Consequently the method can be considered as a convenient general testbed for practical phase shifting concepts such as strong, weak and attenuated phase shifting. Recent measurements of the lithographic performance of a new concept are reported where phase shifting is combined with off-axis illumination. Experimental as well as simulation data are used to demonstrate this new method. A lithography simulator, Depict from Technology Modeling Associates, Inc. and a related Integrated CAD Framework which is being developed at Rice University was used to simulate and evaluate the performance of the IPS scheme.
dc.language.iso eng
dc.publisher SPIE
Phase shifting
Off-axis illumination
Depth of focus
dc.title A New Interferometric Phase-Shifting Technique for Sub-half-micron Laser Microlithography
dc.type Conference paper Center for Multimedia Communication
dc.citation.location Santa Clara, CA
dc.citation.conferenceName SPIE Conference on Optical/Laser Microlithography VIII
dc.citation.conferenceDate 1995
dc.type.dcmi Text
dc.type.dcmi Text
dc.citation.firstpage 827
dc.citation.lastpage 837

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  • CMC Publications [268]
    Publications by Rice Faculty and graduate students in multimedia communications
  • ECE Publications [1321]
    Publications by Rice University Electrical and Computer Engineering faculty and graduate students

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