An Integrated CAD Framework Linking VLSI Layout Editors and Process Simulators
dc.contributor.author | Sengupta, Chaitali Erdelyi, Miklos Bor, Zsolt Cavallaro, Joseph R. Smayling, Michael C. Szabo, Gabor Tittel, Frank K. Wilson, William L. |
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dc.identifier.uri | http://hdl.handle.net/1911/64279 |
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dc.subject | Photolithographic simulations Critical features CAD framework |
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dc.identifier.doi | http://dx.doi.org/10.1117/12.240955 |
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Publications by Rice University Electrical and Computer Engineering faculty and graduate students