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dc.contributor.authorErdelyi, Miklos
Horvath, Zoltan L.
Szabo, Gabor
Bor, Zs.
Tittel, Frank K.
Cavallaro, Joseph R.
Smayling, Michael C. 2012-06-05T16:31:10Z 2012-06-05T16:31:10Z 1997-03-01
dc.identifier.citation M. Erdelyi, Z. L. Horvath, G. Szabo, Z. Bor, F. K. Tittel, J. R. Cavallaro and M. C. Smayling, "Generation of diffraction-free beams for applications in optical microlithography," Journal of Vacuum Science and Technology B, vol. 15, no. 2, 1997.
dc.description.abstract A new concept based on a Fabry–Perot interferometer for the generation of nondiffracting Bessel beams is described and proposed for potential applications in microlithography such as the fabrication of small isolated patterns. It was experimentally demonstrated that the depth of focus can be increased by a factor of about 2, and simultaneously the transverse resolution improved by a factor of 1.6, when using this technique to image contact holes. The properties of simultaneous imaging of two contact holes were also investigated. It was shown experimentally that, even in the most critical case ~when the first diffraction rings overlap!, undesirable interference effects between the adjacent contact holes can be eliminated by means of a phase shifting technique.
dc.description.sponsorship Texas Instruments
dc.description.sponsorship National Science Foundation
dc.description.sponsorship OTKA Foundation of the Hungarian Academy of Sciences
dc.language.iso eng
dc.publisher American Vacuum Society
Transverse resolution
dc.title Generation of diffraction-free beams for applications in optical microlithography
dc.type Journal article
dc.citation.journalTitle Journal of Vacuum Science and Technology B Center for Multimedia Communication
dc.citation.volumeNumber 15
dc.citation.issueNumber 2
dc.type.dcmi Text
dc.type.dcmi Text
dc.citation.firstpage 287
dc.citation.lastpage 292

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  • CMC Publications [268]
    Publications by Rice Faculty and graduate students in multimedia communications
  • ECE Publications [1289]
    Publications by Rice University Electrical and Computer Engineering faculty and graduate students

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