Now showing items 1-1 of 1

  • A New Phase Shifting Method for High Resolution Microlithography 

    Kido, Motoi; Cavallaro, Joseph R.; Szabo, Gabor; Wilson, William L.; Tittel, Frank K. (SME Press, 1994-01-01)
    One of the most promising lithographic technique for the future designs of DRAMs is the phase-shifting mask technique. Conventional phase shifting-masks, however, are difficult to fabricate as they require regions of ...