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Browsing George R. Brown School of Engineering by Author "Erdelyi, Miklos"

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Date | Authors | Titles | Subjects | Type

Now showing items 1-8 of 8

Enhanced Microlithography Using Combined Phase Shifting and Off-axis Illumination

Erdelyi, Miklos; Bor, Zsolt; Cavallaro, Joseph R.; Szabo, Gabor; Wilson, William L.; Sengupta, Chaitali; Smayling, Michael C.; Tittel, Frank K. (Japanese Journal of Applied Physics, 1995-12-01)
Generation of diffraction-free beams for applications in optical microlithography

Erdelyi, Miklos; Horvath, Zoltan L.; Szabo, Gabor; Bor, Zs.; Tittel, Frank K.; Cavallaro, Joseph R.; Smayling, Michael C. (American Vacuum Society, 1997-03-01)
Generation of nearly nondiffracting Bessel beams with a Fabry–Perot interferometer

Horvath, Zoltan L.; Erdelyi, Miklos; Szabo, Gabor; Bor, Zs.; Tittel, Frank K.; Cavallaro, Joseph R. (Optical Society of America, 1997-11-01)
An Integrated CAD Framework Linking VLSI Layout Editors and Process Simulators

Sengupta, Chaitali; Erdelyi, Miklos; Bor, Zsolt; Cavallaro, Joseph R.; Smayling, Michael C.; Szabo, Gabor; Tittel, Frank K.; Wilson, William L. (SPIE, 1996-03-01)
A New Interferometric Phase-Shifting Technique for Sub-half-micron Laser Microlithography

Erdelyi, Miklos; Sengupta, Chaitali; Bor, Zsolt; Cavallaro, Joseph R.; Kido, Motoi; Smayling, Michael C.; Tittel, Frank K.; Wilson, William L.; Szabo, Gabor (SPIE, 1995-02-01)
A New Phase Shifting Technique for Deep UV Excimer Laser Based Lithography

Bor, Zsolt; Cavallaro, Joseph R.; Erdelyi, Miklos; Kido, Motoi; Sengupta, Chaitali; Smayling, Michael; Szabo, Gabor; Tittel, Frank; Wilson, William (SPIE, 1995-02-01)
Sub-quarter micron contact hole fabrication using annular illumination

Erdelyi, Miklos; Bor, Zsolt; Szabo, Gabor; Cavallaro, Joseph R.; Smayling, Michael C.; Tittel, Frank K.; Wilson, William L. (SPIE, 1996-03-01)
Ultrahigh Resolution Lithography with Excimer Lasers

Tittel, Frank K.; Erdelyi, Miklos; Sengupta, Chaitali; Bor, Zsolt; Szabo, Gabor; Cavallaro, Joseph R.; Smayling, Michael C.; Wilson, William L. (Kluwer Academic Publishers, 1995-07-01)