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Browsing CMC Publications by Author "Wilson, William"

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A New Phase Shifting Technique for Deep UV Excimer Laser Based Lithography

Z. Bor, J. R. Cavallaro, M. Erdelyi, M. Kido, C. Sengupta, M. Smayling, G. Szabo, F. Tittel and W. Wilson,"A New Phase Shifting Technique for Deep UV Excimer Laser Based Lithography," in SPIE Conference on Photonics West, 1995, pp. 195-202.