deposit_your_work

Browse the entire archive

Advanced Search

My Account

Login

Statistics

View Statistics

Browsing CMC Publications by Subject "Phase shift"

Browse this collection by:

Date | Authors | Titles | Subjects | Type

Now showing items 1-1 of 1

Interferometric Phase Shift Technique for High Resolution Deep UV Microlithography

F. K. Tittel, J. R. Cavallaro, M. Kido, M. C. Smayling, G. Szabo and W. L. Wilson,"Interferometric Phase Shift Technique for High Resolution Deep UV Microlithography," in Tenth International Symposium on Gas Flow and Chemical Lasers, 1994, pp. 617-624.