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Z. L. Horvath, M. Erdelyi, G. Szabo, Z. Bor, F. K. Tittel and J. R. Cavallaro, "Generation of nearly nondiffracting Bessel beams with a Fabry–Perot interferometer," Journal of the Optical Society of America A, vol. 14, no. 11, pp. 3009-3013, 1997.
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M. Erdelyi, Z. L. Horvath, G. Szabo, Z. Bor, F. K. Tittel, J. R. Cavallaro and M. C. Smayling, "Generation of diffraction-free beams for applications in optical microlithography," Journal of Vacuum Science and Technology B, vol. 15, no. 2, pp. 287-292, 1997.
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M. Erdelyi, Z. Bor, G. Szabo, J. R. Cavallaro, M. C. Smayling, F. K. Tittel and W. L. Wilson,"Sub-quarter micron contact hole fabrication using annular illumination," in SPIE Conference on Optical Microlithography IX, 1996, pp. 88-93.
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C. Sengupta, M. Erdelyi, Z. Bor, J. R. Cavallaro, M. C. Smayling, G. Szabo, F. K. Tittel and W. L. Wilson,"An Integrated CAD Framework Linking VLSI Layout Editors and Process Simulators," in SPIE Conference on Optical Microlithography IX, 1996, pp. 244-252.
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M. Erdelyi, Z. Bor, J. R. Cavallaro, G. Szabo, W. L. Wilson, C. Sengupta, M. C. Smayling and F. K. Tittel, "Enhanced Microlithography Using Combined Phase Shifting and Off-axis Illumination," Japanese Journal of Applied Physics, vol. 34, no. 12A, pp. L1629-L1631, 1995.
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F. K. Tittel, M. Erdelyi, C. Sengupta, Z. Bor, G. Szabo, J. R. Cavallaro, M. C. Smayling and W. L. Wilson,"Ultrahigh Resolution Lithography with Excimer Lasers," in NATO Workshop on Gas Lasers - Recent Developments and Future Prospects, 1995, pp. 263-272.
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Z. Bor, J. R. Cavallaro, M. Erdelyi, M. Kido, C. Sengupta, M. Smayling, G. Szabo, F. Tittel and W. Wilson,"A New Phase Shifting Technique for Deep UV Excimer Laser Based Lithography," in SPIE Conference on Photonics West, 1995, pp. 195-202.
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M. Erdelyi, C. Sengupta, Z. Bor, J. R. Cavallaro, M. Kido, M. C. Smayling, F. K. Tittel, W. L. Wilson and G. Szabo,"A New Interferometric Phase-Shifting Technique for Sub-half-micron Laser Microlithography," in SPIE Conference on Optical/Laser Microlithography VIII, 1995, pp. 827-837.
Z. L. Horvath, M. Erdelyi, G. Szabo, Z. Bor, F. K. Tittel and J. R. Cavallaro, "Generation of nearly nondiffracting Bessel beams with a Fabry–Perot interferometer," Journal of the Optical Society of America A, vol. 14, no. 11, pp. 3009-3013, 1997.
M. Erdelyi, Z. L. Horvath, G. Szabo, Z. Bor, F. K. Tittel, J. R. Cavallaro and M. C. Smayling, "Generation of diffraction-free beams for applications in optical microlithography," Journal of Vacuum Science and Technology B, vol. 15, no. 2, pp. 287-292, 1997.
M. Erdelyi, Z. Bor, G. Szabo, J. R. Cavallaro, M. C. Smayling, F. K. Tittel and W. L. Wilson,"Sub-quarter micron contact hole fabrication using annular illumination," in SPIE Conference on Optical Microlithography IX, 1996, pp. 88-93.
C. Sengupta, M. Erdelyi, Z. Bor, J. R. Cavallaro, M. C. Smayling, G. Szabo, F. K. Tittel and W. L. Wilson,"An Integrated CAD Framework Linking VLSI Layout Editors and Process Simulators," in SPIE Conference on Optical Microlithography IX, 1996, pp. 244-252.
M. Erdelyi, Z. Bor, J. R. Cavallaro, G. Szabo, W. L. Wilson, C. Sengupta, M. C. Smayling and F. K. Tittel, "Enhanced Microlithography Using Combined Phase Shifting and Off-axis Illumination," Japanese Journal of Applied Physics, vol. 34, no. 12A, pp. L1629-L1631, 1995.
F. K. Tittel, M. Erdelyi, C. Sengupta, Z. Bor, G. Szabo, J. R. Cavallaro, M. C. Smayling and W. L. Wilson,"Ultrahigh Resolution Lithography with Excimer Lasers," in NATO Workshop on Gas Lasers - Recent Developments and Future Prospects, 1995, pp. 263-272.
Z. Bor, J. R. Cavallaro, M. Erdelyi, M. Kido, C. Sengupta, M. Smayling, G. Szabo, F. Tittel and W. Wilson,"A New Phase Shifting Technique for Deep UV Excimer Laser Based Lithography," in SPIE Conference on Photonics West, 1995, pp. 195-202.
M. Erdelyi, C. Sengupta, Z. Bor, J. R. Cavallaro, M. Kido, M. C. Smayling, F. K. Tittel, W. L. Wilson and G. Szabo,"A New Interferometric Phase-Shifting Technique for Sub-half-micron Laser Microlithography," in SPIE Conference on Optical/Laser Microlithography VIII, 1995, pp. 827-837.