Now showing items 1-1 of 1
-
M. Erdelyi, Z. L. Horvath, G. Szabo, Z. Bor, F. K. Tittel, J. R. Cavallaro and M. C. Smayling, "Generation of diffraction-free beams for applications in optical microlithography," Journal of Vacuum Science and Technology B, vol. 15, no. 2, pp. 287-292, 1997.