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Now showing items 1-1 of 1
A New Phase Shifting Method for High Resolution Microlithography
Kido, Motoi
;
Cavallaro, Joseph R.
;
Szabo, Gabor
;
Wilson, William L.
;
Tittel, Frank K.
(
SME Press
,
1994-01-01
)
(SME Press, 1994-01-01)