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Browsing by Subject "Off-axis illumination"

Enhanced Microlithography Using Combined Phase Shifting and Off-axis Illumination

Erdelyi, Miklos; Bor, Zsolt; Cavallaro, Joseph R.; Szabo, Gabor; Wilson, William L.; Sengupta, Chaitali; Smayling, Michael C.; Tittel, Frank K. (Japanese Journal of Applied Physics, 1995-12-01)
A New Interferometric Phase-Shifting Technique for Sub-half-micron Laser Microlithography

Erdelyi, Miklos; Sengupta, Chaitali; Bor, Zsolt; Cavallaro, Joseph R.; Kido, Motoi; Smayling, Michael C.; Tittel, Frank K.; Wilson, William L.; Szabo, Gabor (SPIE, 1995-02-01)