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Browsing by Subject "Integrated circuits"
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Automated Evaluation of Critical Features in VLSI Layouts Based on Photolithographic Simulations
Cavallaro, Joseph R.
;
Sengupta, Chaitali
;
Tittel, Frank K.
;
Wilson, William L. Jr.
(
SME Press
,
1996-01-01
)
(SME Press, 1996-01-01)