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Browsing by Subject "Fabry-Perot"
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Now showing items 1-1 of 1
Generation of diffraction-free beams for applications in optical microlithography
Erdelyi, Miklos
;
Horvath, Zoltan L.
;
Szabo, Gabor
;
Bor, Zs.
;
Tittel, Frank K.
;
Cavallaro, Joseph R.
;
Smayling, Michael C.
(
American Vacuum Society
,
1997-03-01
)
(American Vacuum Society, 1997-03-01)