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Browsing by Subject "Excimer laser"

Interferometric Phase Shift Technique for High Resolution Deep UV Microlithography

Tittel, Frank K.; Cavallaro, Joseph R.; Kido, Motoi; Smayling, Michael C.; Szabo, Gabor; Wilson, William L. (SPIE, 1994-09-01)
A New Phase Shifting Technique for Deep UV Excimer Laser Based Lithography

Bor, Zsolt; Cavallaro, Joseph R.; Erdelyi, Miklos; Kido, Motoi; Sengupta, Chaitali; Smayling, Michael; Szabo, Gabor; Tittel, Frank; Wilson, William (SPIE, 1995-02-01)
Ultrahigh Resolution Lithography with Excimer Lasers

Tittel, Frank K.; Erdelyi, Miklos; Sengupta, Chaitali; Bor, Zsolt; Szabo, Gabor; Cavallaro, Joseph R.; Smayling, Michael C.; Wilson, William L. (Kluwer Academic Publishers, 1995-07-01)